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Silicon wafers 125x125mm pseudosquare |
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Published: 06.12.2006
Product: pseudosquare silicon wafers 125x125mm
Quantity: 100.000/month Company: MarketMetal Specifications: 125x125 mm pseudosquare silicon wafers production
Growth method: Cz
Elecrocoductivity type/dopant: P/boron
Crystallographic axis orientation: <100>
Resistivity (central point, on post-annealed samples): 0,5÷6,0 Ohm.cm
Resistivity radial spread: ≤15%
Carbon content: ≤1,0•1017cm-3
Oxygen content (k=2,45): ≤1,0•1018 cm-3
Minor carrier lifetime: ≥ 10 ms
Leneage, twins, swirls, EPD: not allowed, 2•103 cm-2
Pseudosquare side (in center): 125 ± 1,0 mm
Difference of the sides’ length measured in center, for two relatively perpendicular directions: ≤0,3 mm
Diameter difference for two relatively perpendicular directions: ≤0,2 mm
Butt-end surface orientation deviation: ± 3 °
Angle between pseudosquare sides: 90 ± 1 °
Deviation of wafer surface orientation <100>: ± 3 °
Thickness: 240 ± 25 mm
TTV: ≤ 50 mm
Bow : ≤ 50 mm
Edge profile: Without edge profile
Wafers annealing: Without annealing
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